The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Apr. 20, 2012
Hui-chun Yang, Hsin-Chu, TW;
Mei-ling Chen, Hsin-Chu, TW;
Keng-chu Lin, Ping-Tung, TW;
Joung-wei Liou, Zhudong, TW;
Hui-Chun Yang, Hsin-Chu, TW;
Mei-Ling Chen, Hsin-Chu, TW;
Keng-Chu Lin, Ping-Tung, TW;
Joung-Wei Liou, Zhudong, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
Semiconductor devices, methods of manufacture thereof, and methods of forming conductive features thereof are disclosed. A semiconductor device includes an insulating material layer disposed over a workpiece. The insulating material layer includes a silicon-containing material comprising about 13% or greater of carbon (C). A conductive feature is disposed within the insulating material layer. The conductive feature includes a capping layer disposed on a top surface thereof.