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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9337059 B1

PDFFull Text
Date of Patent:
May. 10, 2016

Filed:

Aug. 23, 2011

Apparatus and methods for annealing wafers

Applicants:

Yi-chao Wang, Hsin-Chu, TW;

Yu-chang Lin, Linkou Shiang, TW;

Li-ting Wang, Tainin, TW;

Tai-chun Huang, Hsin-Chu, TW;

Pei-ren Jeng, Chu-Bei, TW;

Tze-liang Lee, Hsin-Chu, TW;

Inventors:

Yi-Chao Wang, Hsin-Chu, TW;

Yu-Chang Lin, Linkou Shiang, TW;

Li-Ting Wang, Tainin, TW;

Tai-Chun Huang, Hsin-Chu, TW;

Pei-Ren Jeng, Chu-Bei, TW;

Tze-Liang Lee, Hsin-Chu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Attorney:

Slater & Matsil, L.L.P.

Primary Examiner:

Calvin Choi

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/324 (2006.01); H01L 21/268 (2006.01); H01L 21/20 (2006.01); H01L 21/36 (2006.01); H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
H01L 21/324 (2013.01); H01L 21/268 (2013.01);
Abstract

A method includes performing an anneal on a wafer. The wafer includes a wafer-edge region, and an inner region encircled by the wafer-edge region. During the anneal, a first power applied on a portion of the wafer-edge region is at least lower than a second power for annealing the inner region.

Find Patent Forward Citations

Wang, Yi-Chao. (2016). Apparatus and methods for annealing wafers (U.S. Patent No. 9337059). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9337059

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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