The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Apr. 29, 2008
Frank Staals, Eindhoven, NL;
Joeri Lof, Eindhoven, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Wim Tjibbo Tel, Helmond, NL;
Bearrach Moest, Eindhoven, NL;
Frank Staals, Eindhoven, NL;
Joeri Lof, Eindhoven, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Wim Tjibbo Tel, Helmond, NL;
Bearrach Moest, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention relates to an image for detection of an aerial pattern comprising spatial differences in radiation intensity in a cross section of a beam of radiation in a lithographic apparatus for exposing a substrate. The image sensor comprises a lens () arranged to form a detection image of the aerial pattern and an image detector () arranged to measure radiation intensities in a plurality, of positions in the detection image.