The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2016
Filed:
Mar. 15, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Eran Amit, Pardes Hanna-Karkur, IL;
Dana Klein, Migdal Ha'emek, IL;
Guy Cohen, D.N. Misgav, IL;
Amir Widmann, D.N. Hof Hacarmel, IL;
Nimrod Shuall, Nofit, IL;
Amnon Manassen, Haifa, IL;
Nuriel Amir, St. Yokne'am, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Aspects of the present disclosure describe systems and methods for calibrating a metrology tool by using proportionality factors. The proportionality factors may be obtained by measuring a substrate under different measurement conditions. Then calculating the measured metrology value and one or more quality merits. From this information, proportionality factors may be determined. Thereafter the proportionality factors may be used to quantify the inaccuracy in a metrology measurement. The proportionality factors may also be used to determine an optimize measurement recipe. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.