The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 23, 2016
Filed:
Apr. 15, 2014
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Chia-Pao Shu, New Taipei, TW;
Chia-Ming Hung, Taipei, TW;
Wen-Chuan Tai, Hsinchu, TW;
Hung-Sen Wang, Tainan, TW;
Hsiang-Fu Chen, Jhudong Township, TW;
Alex Kalnitsky, San Francisco, CA (US);
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0032 (2013.01); B81B 7/0038 (2013.01); B81C 1/00261 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A device includes a first substrate bonded with a second substrate structure. The second substrate structure includes an outgasing prevention structure. At least one micro-electro mechanical system (MEMS) device is disposed over the outgasing prevention structure.
Quick Actions:
Shu, Chia-Pao. (2016). Micro-electro mechanical system (mems) structures and methods of forming the same (U.S. Patent No. 9266714). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9266714
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile