The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2016
Filed:
Mar. 30, 2012
Guido DE Boer, Leerdam, NL;
Thomas Adriaan Ooms, Delfgauw, NL;
Niels Vergeer, Rotterdam, NL;
Godefridus Cornelius Antonius Couweleers, Delft, NL;
Guido de Boer, Leerdam, NL;
Thomas Adriaan Ooms, Delfgauw, NL;
Niels Vergeer, Rotterdam, NL;
Godefridus Cornelius Antonius Couweleers, Delft, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
The invention relates to alignment of an interferometer module for use in an exposure tool. An alignment method is provided for aligning an interferometer to the tool while outside of the too. Furthermore, the invention provides a dual interferometer module, an alignment frame use in the alignment method, and an exposure tool provided with first mounting surfaces for cooperative engagement with second mounting surfaces of an interferometer module.