The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 05, 2016
Filed:
Apr. 20, 2012
Takeyoshi Ohashi, Tokyo, JP;
Yasunari Sohda, Kawasaki, JP;
Makoto Ezumi, Mito, JP;
Muneyuki Fukuda, Kokubunji, JP;
Noritsugu Takahashi, Kokubunji, JP;
Takeyoshi Ohashi, Tokyo, JP;
Yasunari Sohda, Kawasaki, JP;
Makoto Ezumi, Mito, JP;
Muneyuki Fukuda, Kokubunji, JP;
Noritsugu Takahashi, Kokubunji, JP;
HITACHI HIGH-TECHNOLOGIES CORPORATION, Tokyo, JP;
Abstract
A charged particle instrument including a controlling and operating unit for controlling a charged particle source, deflecting means, and focus changing means and making a data for an image by an electric signal detected by a detector, and a recording unit for preserving a correction coefficient registered at each image-acquisition, in which the controlling and operating unit acquires plural images while changing a focus, and controls an optical condition such that a landing angle of a charged particle beam becomes perpendicular when an image for measurement is acquired on the basis of a position shift amount of a mark in the image and a correction coefficient registered to the recording unit.