The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9214556 B1

PDF
Full Text
Expired
Date of Patent:
Dec. 15, 2015

Filed:

Aug. 09, 2013
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Clement Hsingjen Wann, Carmel, NY (US);

Sey-Ping Sun, Hsin-Chu, TW;

Ling-Yen Yeh, Hsin-Chu, TW;

Chi-Yuan Shih, Hsin-Chu, TW;

Li-Chi Yu, Jhubei, TW;

Chun Hsiung Tsai, Xinpu Township, TW;

Chin-Hsiang Lin, Hsin-Chu, TW;

Neng-Kuo Chen, Sinshih Township, TW;

Meng-Chun Chang, Taipei, TW;

Ta-Chun Ma, Hsin-Chu, TW;

Gin-Chen Huang, New Taipei, TW;

Yen-Chun Huang, New Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/785 (2013.01); H01L 29/66795 (2013.01);
Abstract

A method includes growing an epitaxy semiconductor region at a major surface of a wafer. The epitaxy semiconductor region has an upward facing facet facing upwardly and a downward facing facet facing downwardly. The method further includes forming a first metal silicide layer contacting the upward facing facet, and forming a second metal silicide layer contacting the downward facing facet. The first metal silicide layer and the second metal silicide layer comprise different metals.


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