The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 10, 2015

Filed:

Oct. 26, 2011
Applicants:

Yasutaka Toyoda, Mito, JP;

Norio Hasegawa, Hinode, JP;

Ryoichi Matsuoka, Yotsukaido, JP;

Atsuko Yamaguchi, Kodaira, JP;

Inventors:

Yasutaka Toyoda, Mito, JP;

Norio Hasegawa, Hinode, JP;

Ryoichi Matsuoka, Yotsukaido, JP;

Atsuko Yamaguchi, Kodaira, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06T 7/00 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01); G01N 21/00 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
G06T 7/0004 (2013.01); G06T 7/001 (2013.01); H01J 37/222 (2013.01); H01J 37/28 (2013.01); G06T 2207/30141 (2013.01); G06T 2207/30152 (2013.01); H01J 2237/24578 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01); H01L 22/12 (2013.01); H01L 2924/0002 (2013.01);
Abstract

An object of the present invention is to provide an image processing apparatus and a computer program which detects a defect such as a scum at high speed and with high precision. In order to accomplish the above-described object, the present invention proposes an image processing apparatus and a computer program which acquires image data, and detects edge branch points from this image data. Here, at each of the edge branch points, an edge associated therewith branches off in at least three or more directions. According to this configuration, it becomes possible to detect a defect such as a scum without utilizing the reference-pattern image. As a consequence, it becomes possible to detect the scum at high speed and with high precision.


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