The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
Jul. 11, 2012
Norihiro Ito, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Naoki Shindo, Koshi, JP;
Yosuke Hachiya, Koshi, JP;
Takashi Nagai, Koshi, JP;
Norihiro Ito, Koshi, JP;
Kazuhiro Aiura, Koshi, JP;
Naoki Shindo, Koshi, JP;
Yosuke Hachiya, Koshi, JP;
Takashi Nagai, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A top plateis provided to be moved in a horizontal direction between an advanced position, in which the top platecovers from above a substrate W held by a substrate holding unit, and a retracted position that is retracted from the advanced position. An air hoodconfigured to supply a purified gas downward is provided to be lifted between a lower position, in which the air hood covers from above the substrate W held by the substrate holding unit, and an upper position located above the lower position.