The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 27, 2015

Filed:

Jun. 09, 2014
Applicant:

Avogy, Inc., San Jose, CA (US);

Inventors:

Andrew P. Edwards, San Jose, CA (US);

Hui Nie, Cupertino, CA (US);

Isik C. Kizilyalli, San Francisco, CA (US);

Linda Romano, Sunnyvale, CA (US);

David P. Bour, Cupertino, CA (US);

Richard J. Brown, Los Gatos, CA (US);

Thomas R. Prunty, Santa Clara, CA (US);

Assignee:

Avogy, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/04 (2006.01); H01L 29/66 (2006.01); H01L 29/47 (2006.01); H01L 29/868 (2006.01); H01L 29/872 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66143 (2013.01); H01L 21/046 (2013.01); H01L 21/0495 (2013.01); H01L 29/2003 (2013.01); H01L 29/47 (2013.01); H01L 29/475 (2013.01); H01L 29/868 (2013.01); H01L 29/872 (2013.01);
Abstract

A semiconductor structure includes a III-nitride substrate with a first side and a second side opposing the first side. The III-nitride substrate is characterized by a first conductivity type and a first dopant concentration. The semiconductor structure also includes a III-nitride epitaxial structure including a first III-nitride epitaxial layer coupled to the first side of the III-nitride substrate and a plurality of III-nitride regions of a second conductivity type. The plurality of III-nitride regions have at least one III-nitride epitaxial region of the first conductivity type between each of the plurality of III-nitride regions. The semiconductor structure further includes a first metallic structure electrically coupled to one or more of the plurality of III-nitride regions and the at least one III-nitride epitaxial region. A Schottky contact is created between the first metallic structure and the at least one III-nitride epitaxial region.


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