The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 01, 2015
Filed:
Oct. 06, 2011
Yun-tai Shih, Lugang Township, TW;
Kuan-ming Pan, Hsinchu, TW;
Jeng-hao Lin, Chubei, TW;
I-shi Wang, Sanxia Township, TW;
Jui-mu Cho, Chupei, TW;
Ching-hou Su, Hsinchu, TW;
Chyi-tsong NI, Hsinchu, TW;
Wun-kai Tsai, Huwei Township, TW;
Yun-Tai Shih, Lugang Township, TW;
Kuan-Ming Pan, Hsinchu, TW;
Jeng-Hao Lin, Chubei, TW;
I-Shi Wang, Sanxia Township, TW;
Jui-Mu Cho, Chupei, TW;
Ching-Hou Su, Hsinchu, TW;
Chyi-Tsong Ni, Hsinchu, TW;
Wun-Kai Tsai, Huwei Township, TW;
Abstract
An apparatus is disclosed for detecting flag velocity during a eutectic process for bonding two wafers. The apparatus includes a plurality of sensors for detecting a time and/or velocity of a plurality of flags within a flag-out mechanism. The apparatus also includes one or more displays displaying time durations associated with the movement of the flags during the bonding process. Also disclosed is a method of aligning wafers in a eutectic bonding process. The method includes determining one or more time durations associated with the movement of the flags in the plurality of flags. The method also includes determining if a misalignment has occurred based on the one or more time durations associated with the movement of the flags.