The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9110092 B1

PDF
Full Text
Expired
Date of Patent:
Aug. 18, 2015

Filed:

Apr. 07, 2014
Applicant:

Nt-mdt Development Inc., Tempe, AZ (US);

Inventors:

Serguei Magonov, Tempe, AZ (US);

Sergey Belikov, Goleta, CA (US);

John David Alexander, Tempe, AZ (US);

Craig Gordon Wall, Chandler, AZ (US);

Stanislav Leesment, Moscow-Zelenograd, RU;

Viktor Bykov, Moscow-Zelenograd, RU;

Assignee:

NT-MDT Development Inc., Tempe, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 13/16 (2006.01); G01B 5/28 (2006.01); G01Q 10/00 (2010.01); G01Q 60/38 (2010.01); G05D 23/19 (2006.01);
U.S. Cl.
CPC ...
G01Q 10/00 (2013.01); G01Q 60/38 (2013.01); G05D 23/19 (2013.01);
Abstract

This invention relates to multi-purpose probe-based apparatus, and to methods for providing images of surface topography, and detection and quantitative mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode. These methods may include filtering of incoming probe signals. These incoming probe signals provide time deflection curves, parts of which are used for the control of scanning and collection of data that reflects sample adhesion, stiffness, elastic modulus and viscoelastic response, electric and magnetic interactions. These methods permit adaptive choice of an AFM's deflection set-point, which allows imaging at the contact repulsive force for precise surface profilometry, as non-resonant oscillation brings tip and sample into intermittent contact. These methods permit choosing a desired deformation model that allows an extraction of quantitative mechanical properties including viscoelastic response from deflection curves. These methods also permit local quantitative measurements of tip-sample current and detection of surface potential, capacitance gradients and piezoresponse in non-resonant oscillatory mode. The stable thermal environment reduces apparatus thermal drift and improves apparatus performance.


Find Patent Forward Citations

Magonov, Serguei. (2015). Scanning probe based apparatus and methods for low-force profiling of sample surfaces and detection and mapping of local mechanical and electromagnetic properties in non-resonant oscillatory mode (U.S. Patent No. 9110092). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9110092

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