The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
May. 19, 2011
Moshe Langer, Nes Ziona, IL;
Ofer Adan, Rehovot, IL;
Ram Peltinov, Tel Aviv, IL;
Yoram Uziel, Post Misgav, IL;
Ori Shoval, Ashdod, IL;
Moshe Langer, Nes Ziona, IL;
Ofer Adan, Rehovot, IL;
Ram Peltinov, Tel Aviv, IL;
Yoram Uziel, Post Misgav, IL;
Ori Shoval, Ashdod, IL;
APPLIED MATERIALS ISRAEL, LTD., Rehovot, IL;
Abstract
A method, a system and a computer readable medium are provided. The method may include obtaining or receiving first area information representative of a first area of a first layer of an inspected object; wherein the inspected object further comprises a second layer that comprises a second area; wherein the second layer is buried under the first layer; directing electrons of a primary electron beam to interact with the first area; directing electrons of the primary electron beam to interact with the second area; generating detection signals responsive to electrons that were scattered or reflected from at least one of the first and second areas; and determining at least one spatial relationship between at least one feature of the first area and at least one feature of the second area based on the detection signals and on the first area information.