The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Aug. 13, 2010
Applicants:
Christian Dussarrat, Wilmington, DE (US);
Vincent M. Omarjee, Grenoble, FR;
Venkateswara R. Pallem, Hockessin, DE (US);
Inventors:
Christian Dussarrat, Wilmington, DE (US);
Vincent M. Omarjee, Grenoble, FR;
Venkateswara R. Pallem, Hockessin, DE (US);
Assignee:
American Air Liquide, Inc., Houston, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C07F 17/00 (2006.01);
U.S. Cl.
CPC ...
C07F 17/00 (2013.01); C23C 16/18 (2013.01);
Abstract
Disclosed are hafnium- and zirconium-containing precursors and methods of providing the same. The disclosed precursors include a ligand and at least one aliphatic group as substituent selected to have greater degrees of freedom than the usual substituents. The disclosed precursors may be used to deposit hafnium- or zirconium-containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition.