The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 19, 2015
Filed:
Jun. 21, 2011
Sergey Oshemkov, Karmiel, IL;
Ralph Klaesges, Aalen, DE;
Markus Mengel, Heidenheim, DE;
Vladimir Kruglyakov, Haemek, IL;
Eitan Zait, Tivon, IL;
Vladimir Dmitriev, Karmiel, IL;
Guy Ben-zvi, Misgav, IL;
Steven Labovitz, Sunnyvale, CA (US);
Sergey Oshemkov, Karmiel, IL;
Ralph Klaesges, Aalen, DE;
Markus Mengel, Heidenheim, DE;
Vladimir Kruglyakov, Haemek, IL;
Eitan Zait, Tivon, IL;
Vladimir Dmitriev, Karmiel, IL;
Guy Ben-Zvi, Misgav, IL;
Steven Labovitz, Sunnyvale, CA (US);
Carl Zeiss SMS GmbH, Jena, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Carl Zeiss SMS Ltd., Karmiel, IL;
Abstract
A system for processing a substrate includes a light source to provide light pulses, a stage to support a substrate, optics to focus the light pulses onto the substrate, a scanner to scan the light pulses across the substrate, a computer to control properties of the light pulses and the scanning of the light pulses such that color centers are generated in various regions of the substrate, and at least one of (i) an ultraviolet light source to irradiate the substrate with ultraviolet light or (ii) a heater to heat the substrate after formation of the color centers to stabilize a transmittance spectrum of the substrate.