The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
May. 28, 2012
Hideo Morishita, Tokyo, JP;
Takashi Ohshima, Tokyo, JP;
Michio Hatano, Tokyo, JP;
Sukehiro Ito, Tokyo, JP;
Hideo Morishita, Tokyo, JP;
Takashi Ohshima, Tokyo, JP;
Michio Hatano, Tokyo, JP;
Sukehiro Ito, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (), an aperture (), a sample table (), an electron optical system (-) for making an electron beam () converge on a sample (), a deflection means (), a secondary electron detector (), a reflected electron detector (), and a cylindrical electron transport means () in a position between the electron gun () and sample (). The reflected electron detector () is provided within the electron transport means () and on a side further away from the electron gun () than the secondary electron detector () and the deflection means (). The reception surface (-) of the reflected electron detector () is electrically wired so as to have the same potential as the electron transport means ().