The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Nov. 11, 2013
Applicant:
Rohm and Hass Electronic Materials Llc, Marlborough, MA (US);
Inventors:
Deyan Wang, Hudson, MA (US);
Chunyi Wu, Shrewsbury, MA (US);
Cong Liu, Shrewsbury, MA (US);
Gerhard Pohlers, Needham, MA (US);
Cheng-bai Xu, Southborough, MA (US);
George G. Barclay, Jefferson, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/039 (2006.01); G03F 7/09 (2006.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01); C08F 220/34 (2006.01); C08F 226/06 (2006.01); C08F 220/18 (2006.01); C08F 220/32 (2006.01); C08F 220/36 (2006.01); C08F 220/58 (2006.01); C08F 220/24 (2006.01); C08F 220/38 (2006.01); C08F 220/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); G03F 7/09 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/2041 (2013.01); C08F 220/34 (2013.01); C08F 226/06 (2013.01); C08F 220/18 (2013.01); C08F 220/24 (2013.01); C08F 220/32 (2013.01); C08F 220/36 (2013.01); C08F 220/38 (2013.01); C08F 220/58 (2013.01); C08F 2220/1833 (2013.01); C08F 2220/283 (2013.01);
Abstract
A polymer includes the polymerized product of monomers including a nitrogen-containing monomer comprising formula (Ia), formula (Ib), or a combination of formulas (Ia) and (Ib), and an acid-deprotectable monomer having the formula (II): wherein a, L, LN, R, R, R, and X are defined herein. The polymer is a useful component of a photoresist composition.