The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
May. 15, 2012
Daishi Yokoyama, Shizouka, JP;
Takashi Fuke, Shizouka, JP;
Yuji Tashiro, Shizouka, JO;
Takashi Sekito, Shizouka, JP;
Toshiaki Nonaka, Shizouka, JP;
Daishi Yokoyama, Shizouka, JP;
Takashi Fuke, Shizouka, JP;
Yuji Tashiro, Shizouka, JO;
Takashi Sekito, Shizouka, JP;
Toshiaki Nonaka, Shizouka, JP;
AZ Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
A positive photosensitive siloxane composition comprising at least three types of following polysiloxanes (A), (B) and (C) obtained by hydrolyzing and condensing a silane compound represented by general formula (1) RSi (OR), a diazonaphthoquinone derivative, and a solvent: a polysiloxane (A) such that if pre-baked the film thereof will be soluble in a 5 weight % TMAH aqueous solution and the solution rate of said film will be 1,000 Å/sec or less; a polysiloxane (B) such that if pre-baked the solution rate of the film thereof will be 4,000 Å/sec or more relative to a 2.38 weight % TMAH aqueous solution; and a polysiloxane (C) such that if pre-baked the solution rate of the film thereof will be between 200 and 3,000 Å/sec relative to a 2.38 weight % TMAH aqueous solution. (In the formula, Rrepresents a C1-20 linear or branched cyclic alkyl group, in which any methylene may be substituted by oxygen, or a C6-20 aryl group, in which any hydrogen may be substituted by fluorine; n represents a 0 or a 1; and Rrepresents a C1-5 alkyl group.)