The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
May. 03, 2007
Frank Staals, Eindhoven, NL;
Joeri Lof, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Wim Tjibbo Tel, Helmond, NL;
Bearrach Moest, Eindhoven, NL;
Frank Staals, Eindhoven, NL;
Joeri Lof, Eindhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Wim Tjibbo Tel, Helmond, NL;
Bearrach Moest, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention relates to an image sensor for detection of an aerial image formed by a beam of radiation in a lithographic projection apparatus for exposing a pattern onto a substrate held in a substrate plane by a substrate holder. The image sensor has an image detector and a lens. The lens is arranged to project at least part of the aerial image onto the image detector. The image sensor is positioned such within the substrate holder that the lens is positioned proximate the substrate plane.