The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Dec. 12, 2012
Rohm and Haas Electronic Materials Llc, Marlborough, MA (US);
Emad Aqad, Northborough, MA (US);
Cheng-Bai Xu, Southborough, MA (US);
Mingqi Li, Shrewsbury, MA (US);
William Williams, III, Ipswich, MA (US);
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Abstract
A photoacid generator includes those of formula (I): wherein each Rin formula 1 is independently H, F, a Cnonfluorinated organic group, Cfluorinated organic group, or a combination comprising at least one of the foregoing, provided at least one Ris F or a Cfluorinated organic group, the Cfluorinated and nonfluorinated organic groups each optionally comprising O, S, N, or a combination comprising at least one of the foregoing heteroatoms; Lis a linking group comprising a heteroatom comprising O, S, N, F, or a combination comprising at least one of the foregoing; Gis an onium salt of the formula (II): wherein in formula (II), X is S or I, each Ris independently Calkyl group; a polycyclic or monocyclic Ccycloalkyl group; a polycyclic or monocyclic Caryl group; or a combination comprising at least one of the foregoing, provided at least one Ris substituted where each Ris a Cmonocyclic aryl group, and wherein when X is I, a is 2, and where X is S, a is 3, p is 0 or 1, and q is an integer of from 1 to 10.