The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
May. 16, 2011
Applicants:
Andrew V. Hill, San Jose, CA (US);
Amnon Manassen, Haifa, IL;
Daniel Kandel, Aseret, IL;
Vladimir Levinski, Nazareth Ilit, IL;
Joel Seligson, Misgav, IL;
Alexander Svizher, Haifa, IL;
David Y. Wang, Santa Clara, CA (US);
Lawrence D. Rotter, Pleasanton, CA (US);
Johannes D. DE Veer, Menlo Park, CA (US);
Inventors:
Andrew V. Hill, San Jose, CA (US);
Amnon Manassen, Haifa, IL;
Daniel Kandel, Aseret, IL;
Vladimir Levinski, Nazareth Ilit, IL;
Joel Seligson, Misgav, IL;
Alexander Svizher, Haifa, IL;
David Y. Wang, Santa Clara, CA (US);
Lawrence D. Rotter, Pleasanton, CA (US);
Johannes D. de Veer, Menlo Park, CA (US);
Assignee:
KLA-Tencor Corp., Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G02B 27/14 (2006.01); G01N 21/47 (2006.01);
U.S. Cl.
CPC ...
G02B 27/141 (2013.01); G02B 27/145 (2013.01); G01N 2021/4792 (2013.01); G01N 21/474 (2013.01); G01N 21/4788 (2013.01);
Abstract
Systems and methods for discrete polarization scatterometry are provided.