The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2014
Filed:
Dec. 12, 2008
Jean-paul Booth, Boullay les Troux, FR;
Alexei Marakhtanov, Albany, CA (US);
Rajinder Dhindsa, San Jose, CA (US);
Luc Albarede, Fremont, CA (US);
Seyed Jafar Jafarian-tehrani, Fremont, CA (US);
Jean-Paul Booth, Boullay les Troux, FR;
Alexei Marakhtanov, Albany, CA (US);
Rajinder Dhindsa, San Jose, CA (US);
Luc Albarede, Fremont, CA (US);
Seyed Jafar Jafarian-Tehrani, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
An arrangement within a plasma reactor for detecting a plasma unconfinement event is provided. The arrangement includes a sensor, which is a capacitive-based sensor implemented within the plasma reactor. The sensor is implemented outside of a plasma confinement region and is configured to produce a transient current when the sensor is exposed to plasma associated with the plasma unconfinement event. The sensor has at least one electrically insulative layer oriented toward the plasma associated with the plasma unconfined event. The arrangement also includes a detection circuit, which is electrically connected to the sensor for converting the transient current into a transient voltage signal and for processing the transient voltage signal to ascertain whether the plasma unconfinement event exists.