The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2014

Filed:

Oct. 25, 2012
Applicant:

Siliconware Precision Industries Co., Ltd., Taichung Hsien, TW;

Inventors:

Hong-Da Chang, Taichung Hsien, TW;

Cheng-Hsiang Liu, Taichung Hsien, TW;

Kuang-Wei Huang, Taichung Hsien, TW;

Chun-Hung Lin, Taichung Hsien, TW;

Hsin-Yi Liao, Taichung Hsien, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/22 (2006.01); H01L 23/24 (2006.01); H01L 23/051 (2006.01); H01L 23/053 (2006.01); H01L 23/043 (2006.01);
U.S. Cl.
CPC ...
H01L 23/051 (2013.01); H01L 23/053 (2013.01); H01L 23/043 (2013.01);
Abstract

A package structure is provided, including: a substrate having a ground pad and an MEMS element; a lid disposed on the substrate for covering the MEMS element; a wire segment electrically connected to the ground pad; an encapsulant encapsulating the lid and the wire segment; and a circuit layer formed on the encapsulant and electrically connected to the wire segment and the lid so as to commonly ground the substrate and the lid, thereby releasing accumulated electric charges on the lid so as to improve the reliability of the MEMS system and reduce the number of I/O connections.


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