The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 28, 2014

Filed:

Oct. 17, 2013
Applicant:

Micron Technology, Inc., Boise, ID (US);

Inventors:

Jaspreet S. Gandhi, Boise, ID (US);

Don L. Yates, Boise, ID (US);

Yangyang Sun, San Diego, CA (US);

Assignee:

Micron Technology, Inc., Boise, ID (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/52 (2006.01); H01L 23/29 (2006.01); H01L 23/31 (2006.01); H01L 23/498 (2006.01); H01L 23/00 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49811 (2013.01); H01L 2224/12105 (2013.01); H01L 23/293 (2013.01); H01L 2224/03472 (2013.01); H01L 23/48 (2013.01); H01L 2224/05572 (2013.01); H01L 2224/0603 (2013.01); H01L 23/3171 (2013.01); H01L 2224/1403 (2013.01); H01L 2224/05147 (2013.01); H01L 2924/014 (2013.01); H01L 2924/01033 (2013.01); H01L 2924/01006 (2013.01); H01L 2224/05005 (2013.01); H01L 24/03 (2013.01); H01L 2224/05164 (2013.01); H01L 24/14 (2013.01); H01L 24/05 (2013.01); H01L 2924/01049 (2013.01); H01L 21/76828 (2013.01); H01L 2924/01082 (2013.01); H01L 2224/05155 (2013.01); H01L 2224/05026 (2013.01); H01L 21/76804 (2013.01); H01L 24/13 (2013.01); H01L 2224/05582 (2013.01); H01L 2224/131 (2013.01); H01L 2924/01079 (2013.01); H01L 2224/05644 (2013.01); H01L 2224/03464 (2013.01); H01L 2924/01044 (2013.01); H01L 21/766814 (2013.01); H01L 2924/01029 (2013.01); H01L 2924/01005 (2013.01); H01L 2224/0348 (2013.01);
Abstract

Methods of forming a Ni material on a bond pad are disclosed. The methods include forming a dielectric material over an at least one bond pad, forming an opening within the dielectric material to expose the at least one bond pad, curing the dielectric material to form a surface of the dielectric material having a steep curvilinear profile, and forming a nickel material over the at least one bond pad. The dielectric material having a steep curvilinear profile may be formed by altering at least one of a curing process of the dielectric material and a thickness of the dielectric material. The dielectric material may be used to form a relatively thick Ni material on bond pads smaller than about 50 μm. Semiconductor structures formed by such methods are also disclosed.


Find Patent Forward Citations

Loading…