The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2014
Filed:
Mar. 18, 2009
Applicants:
Olivier Letessier, San Jose, CA (US);
Christian Dussarrat, Wilmington, DE (US);
Benjamin J. Feist, Wilmington, DE (US);
Vincent M. Omarjee, Bear, DE (US);
Inventors:
Olivier Letessier, San Jose, CA (US);
Christian Dussarrat, Wilmington, DE (US);
Benjamin J. Feist, Wilmington, DE (US);
Vincent M. Omarjee, Bear, DE (US);
Assignees:
Air Liquide Electronics U.S. LP, Dallas, TX (US);
American Air Liquide, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01B 1/00 (2006.01); H01B 1/12 (2006.01); B05D 5/12 (2006.01); C23C 16/00 (2006.01); C23C 16/40 (2006.01); B05D 3/12 (2006.01); B05D 3/00 (2006.01); H05H 1/24 (2006.01); H01T 14/00 (2006.01); H05B 6/02 (2006.01); H05B 6/24 (2006.01); C07F 5/00 (2006.01); C08B 5/04 (2006.01); H01L 39/24 (2006.01); C04B 35/45 (2006.01); C21B 13/00 (2006.01); C21B 11/10 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/404 (2013.01); C23C 16/45553 (2013.01); C23C 16/409 (2013.01);
Abstract
Methods and compositions for the deposition of a film on a substrate. In general, the disclosed compositions and methods utilize a precursor containing calcium or strontium.