The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2014
Filed:
Oct. 14, 2011
Daisuke Muto, Hitachinaka, JP;
Masanori Watanabe, Hitachinaka, JP;
Masaru Matsushima, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Masahiro Akatsu, Hitachinaka, JP;
Yusuke Tanba, Hitachinaka, JP;
Satoshi Okada, Mito, JP;
Daisuke Muto, Hitachinaka, JP;
Masanori Watanabe, Hitachinaka, JP;
Masaru Matsushima, Hitachinaka, JP;
Shuichi Nakagawa, Hitachinaka, JP;
Masahiro Akatsu, Hitachinaka, JP;
Yusuke Tanba, Hitachinaka, JP;
Satoshi Okada, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Charged particle beam apparatus arrangements in which either a first noise absorber which provides noise absorbing performance specialized for a first frequency range including the natural frequency of the charged particle beam apparatus as reference, or a second noise absorber which provides noise absorbing performance specialized for a second frequency range including the frequency of acoustic standing waves generated within the cover as reference, or both of the first and second noise absorbers is/are disposed within a cover of the charged particle beam apparatus.