The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2014
Filed:
Jun. 04, 2013
Hitachi High-technologies Corporation, Tokyo, JP;
Kaifeng Zhang, Yokohama, JP;
Takenori Hirose, Tokyo, JP;
Masahiro Watanabe, Yokohama, JP;
Shinji Homma, Nakai, JP;
Tsuneo Nakagomi, Nakai, JP;
Teruaki Tokutomi, Odawara, JP;
Toshihiko Nakata, Hiratsuka, JP;
Takehiro Tachizaki, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In a method and an apparatus for inspecting a thermally assisted magnetic recording head element, a specimen is mounted on a table movable in a plane of a scanning probe microscope device, evanescent light is generated from a portion of light emission of evanescent light of the specimen, scattered light of the evanescent light is detected by moving the table in the plane while a cantilever of the scanning probe microscope having a probe is vertically vibrated in the vicinity of a surface of the specimen, and an intensity distribution of the evanescent light emitted from the portion of light emission of evanescent light or a surface profile of the portion of light emission of evanescent light of the specimen is inspected using position information of generation of the evanescent light based on the detected scattered light.