The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2014
Filed:
Sep. 20, 2012
Applied Materials Israel, Ltd., Rehovot, IL;
Igor Krivts (Krayvitz), Rehovot, IL;
Israel Avneri, Ramat-Gan, IL;
Yoram Uziel, Misgav, IL;
Nir Ben-David Dodzin, Hod Hasharon, IL;
Ido Holcman, Rehovot, IL;
Itzak Yair, Beer Yaakov, IL;
Yosi Basson, Holon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
A coupling module may include an upper portion that defines an aperture, mask contact elements, chuck contact elements and an intermediate element that is connected between the mask contact elements and the upper portion. A shape and a size of the aperture may correspond to a shape and size of a pattern transfer area of an extreme ultra violet (EUVL) mask. The coupling module may be shaped and sized so that once the mask contact elements contact the upper portion of the EUVL mask, the chuck contact elements contact a chuck that supports the mask. The coupling module may further provide at least one conductive path between the upper portion of the EUVL mask and the chuck when the EUVL mask is positioned on the chuck.