The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2014

Filed:

Jul. 30, 2013
Applicant:

Carl Zeiss Sms Gmbh, Jena, DE;

Inventors:

Christof Baur, Darmstadt, DE;

Klaus Edinger, Lorsch, DE;

Thorsten Hofmann, Rodgau, DE;

Gabriel Baralia, Darmstadt, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 10/00 (2010.01);
U.S. Cl.
CPC ...
G01Q 10/00 (2013.01);
Abstract

The invention refers to a probe assembly for a scanning probe microscope which comprises at least one first probe-adapted for analyzing a specimen, at least one second probe adapted for modifying the specimen and at least one motion element associated with the probe assembly and adapted for scanning one of the probes being in a working position across a surface of the specimen so that the at least one first probe interacts with the specimen whereas the at least one second probe is in a neutral position in which it does not interact with the specimen and to bring the at least one second probe into a position so that the at least one second probe can modify a region of the specimen analyzed with the at least one first probe.


Find Patent Forward Citations

Loading…