The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2014
Filed:
Feb. 01, 2012
David L. Brown, Los Gatos, CA (US);
Mansour Kermat, San Jose, CA (US);
Lance Glasser, Saratoga, CA (US);
Henrik Nielsen, San Jose, CA (US);
Guowu Zheng, Cupertino, CA (US);
Kurt Lehman, Menlo Park, CA (US);
Kenneth F. Hatch, Sunol, CA (US);
Alex Chuang, Cupertino, CA (US);
Venkatraman Iyer, Sunnyvale, CA (US);
David L. Brown, Los Gatos, CA (US);
Mansour Kermat, San Jose, CA (US);
Lance Glasser, Saratoga, CA (US);
Henrik Nielsen, San Jose, CA (US);
Guowu Zheng, Cupertino, CA (US);
Kurt Lehman, Menlo Park, CA (US);
Kenneth F. Hatch, Sunol, CA (US);
Alex Chuang, Cupertino, CA (US);
Venkatraman Iyer, Sunnyvale, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A module for high speed image processing includes an image sensor for generating a plurality of analog outputs representing an image and a plurality of HDDs for concurrently processing the plurality of analog outputs. Each HDD is an integrated circuit configured to process in parallel a predetermined set of the analog outputs. Each channel of the HDD can include an AFE for conditioning a signal representing one sensor analog output, an ADC for converting a conditioned signal into a digital signal, and a data formatting block for calibrations and formatting the digital signal for transport to an off-chip device. The HDDs and drive electronics are combined with the image sensor into one package to optimize signal integrity and high dynamic range, and to achieve high data rates through use of synchronized HDD channels. Combining multiple modules results in a highly scalable imaging subsystem optimized for inspection and metrology applications.