The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2014
Filed:
Nov. 04, 2010
Tadashi Obikane, Yamanashi, JP;
Kazuya Yano, Yamanashi, JP;
Hiroshi Yamada, Yamanashi, JP;
Masaru Suzuki, Yamanashi, JP;
Yasuhito Yamamoto, Yamanashi, JP;
Tadashi Obikane, Yamanashi, JP;
Kazuya Yano, Yamanashi, JP;
Hiroshi Yamada, Yamanashi, JP;
Masaru Suzuki, Yamanashi, JP;
Yasuhito Yamamoto, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe apparatus includes a plurality of prober chamber arranged in a straight line; and a loader chamber having a substrate transfer mechanism that takes out a test target substrate from a container provided in an upper area of the prober chamber, lowers the test target substrate to a height corresponding to a loading/unloading port of the prober chamber, moves in front of a row of the prober chambers in parallel to the row of the prober chambers and transfers the test target substrate into the prober chamber. A reading mechanism for reading information recorded on the test target substrate held on the substrate transfer mechanism is installed at a horizontal moving mechanism that moves the substrate transfer mechanism in front of the row of the prober chambers in parallel to the row of the prober chambers.