The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2014
Filed:
Oct. 20, 2010
Stephan Kronholz, Dresden, DE;
Maciej Wiatr, Dresden, DE;
Roman Boschke, Dresden, DE;
Peter Javorka, Radeburg, DE;
Stephan Kronholz, Dresden, DE;
Maciej Wiatr, Dresden, DE;
Roman Boschke, Dresden, DE;
Peter Javorka, Radeburg, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
When forming sophisticated gate electrode structures requiring a threshold adjusting semiconductor alloy for one type of transistor, a recess is formed in the corresponding active region, thereby providing superior process uniformity during the deposition of the semiconductor material. Moreover, the well dopant species is implanted after the recessing, thereby avoiding undue dopant loss. Due to the recess, any exposed sidewall surface areas of the active region may be avoided during the selective epitaxial growth process, thereby significantly contributing to enhanced threshold stability of the resulting transistor including the high-k metal gate stack.