The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2014
Filed:
Feb. 17, 2012
Chia-pao Shu, New Taipei, TW;
Chia-ming Hung, Taipei, TW;
Wen-chuan Tai, Hsinchu, TW;
Hung-sen Wang, Tainan, TW;
Hsiang-fu Chen, Jhudong Township, TW;
Alex Kalnitsky, San Francisco, CA (US);
Chia-Pao Shu, New Taipei, TW;
Chia-Ming Hung, Taipei, TW;
Wen-Chuan Tai, Hsinchu, TW;
Hung-Sen Wang, Tainan, TW;
Hsiang-Fu Chen, Jhudong Township, TW;
Alex Kalnitsky, San Francisco, CA (US);
Abstract
A device includes a capping substrate bonded with a substrate structure. The substrate structure includes an integrated circuit structure. The integrated circuit structure includes a top metallic layer disposed on an outgasing prevention structure. At least one micro-electro mechanical system (MEMS) device is disposed over the top metallic layer and the outgasing prevention structure.