The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2014
Filed:
May. 20, 2011
Toshiyuki Nakao, Yokohama, JP;
Junguo Xu, Kasumigaura, JP;
Yuki Shimizu, Sendai, JP;
Toshihiko Nakata, Hiratsuka, JP;
Toshifumi Honda, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Junguo Xu, Kasumigaura, JP;
Yuki Shimizu, Sendai, JP;
Toshihiko Nakata, Hiratsuka, JP;
Toshifumi Honda, Yokohama, JP;
Yukihiro Shibata, Fujisawa, JP;
Yuta Urano, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A defect inspecting method is provided which comprises a pre-scan defect inspecting process including a pre-scan irradiating step for casting irradiation light onto the surface of a sample, a pre-scan detecting step for detecting the scattered lights, and a pre-scan defect information collecting step for obtaining information on preselected defects present on the sample surface on the basis of the scattered lights; a near-field defect inspecting process including a near-field irradiating step in which the distance between the sample surface and a near-field head is adjusted so that the sample surface is irradiated, a near-field detecting step for detecting near-field light response, and a near-field defect information collecting step for obtaining information on the preselected defects on the basis of the near-field light response; and a merging process for inspecting defects present on the sample surface by merging the pieces of information on the preselected defects.