The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 11, 2014
Filed:
Mar. 16, 2007
Christian Dussarrat, Tokyo, JP;
Nicolas Blasco, Grenoble, FR;
Audrey Pinchart, Toulouse, FR;
Christophe Lachaud, Saint Michel sur Orge, FR;
Christian Dussarrat, Tokyo, JP;
Nicolas Blasco, Grenoble, FR;
Audrey Pinchart, Toulouse, FR;
Christophe Lachaud, Saint Michel sur Orge, FR;
Abstract
Method of deposition on a substrate, of a metal containing dielectric film comprising a compound of the formula (I):(MM)ON,  (I)wherein 0≦a<1, 0<b≦3, 0≦c≦1, Mrepresents a metal selected from (Hf), (Zr) and (Ti); and Mrepresents a metal atom atoms, which comprises the following steps:
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile