The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Jun. 02, 2006
Applicants:
Nicolas Blasco, Grenoble, FR;
Christian Dussarrat, Wilmington, DE (US);
Inventors:
Nicolas Blasco, Grenoble, FR;
Christian Dussarrat, Wilmington, DE (US);
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming on at least one support at least one metal containing dielectric films having the formula (MM) ON, wherein: 0≦a<1, 01 and Mbeing metals Hf, Zr or Ti using precursors with pentadienyl ligands and/or cyclopentadienyl ligands.