The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 18, 2014
Filed:
Nov. 09, 2012
Akira Hamamatsu, Chiba, JP;
Yoshimasa Oshima, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Hisae Shibuya, Chigasaki, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Akira Hamamatsu, Chiba, JP;
Yoshimasa Oshima, Yokohama, JP;
Shunji Maeda, Yokohama, JP;
Hisae Shibuya, Chigasaki, JP;
Yuta Urano, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An inspecting method and apparatus for inspecting a substrate surface includes illuminating a light to the substrate surface having a film, detection of a scattered light or reflected light from a plurality of positions of the substrate surface to obtain a plurality of electrical signals, comparison of the plurality of electrical signals and a database which indicates a relationship between the electrical signals and surface roughness, and calculation of a surface roughness value based on the result of comparison.