The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2014
Filed:
Oct. 06, 2009
Masashi Shibahara, Hitachinaka, JP;
Mikio Tokuyama, Tsuchiura, JP;
Koichiro Takeuchi, Hitachinaka, JP;
Shigeru Haneda, Hitachinaka, JP;
Osamu Yamada, Hitachinaka, JP;
Naoki Sakamoto, Hitachinaka, JP;
Eiichi Hazaki, Tsuchiura, JP;
Akito Tanokuchi, Hitachinaka, JP;
Masashi Shibahara, Hitachinaka, JP;
Mikio Tokuyama, Tsuchiura, JP;
Koichiro Takeuchi, Hitachinaka, JP;
Shigeru Haneda, Hitachinaka, JP;
Osamu Yamada, Hitachinaka, JP;
Naoki Sakamoto, Hitachinaka, JP;
Eiichi Hazaki, Tsuchiura, JP;
Akito Tanokuchi, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A stage comprises a linear guide rail () for guiding a movable table (), a driven bar (), a linear drive actuator in contact with the driven bar () to transmit driving force to the driven bar (), and parallel plate springs () for holding opposite ends of the driven bar (). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs () reduce deforming forces applied to sections supporting the driven bar (), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.