The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2014
Filed:
Jan. 12, 2011
Hideo Morishita, Hachioji, JP;
Michio Hatano, Hitachinaka, JP;
Takashi Ohshima, Saitama, JP;
Mitsugu Sato, Hitachinaka, JP;
Tetsuya Sawahata, Hitachinaka, JP;
Sukehiro Ito, Hitachinaka, JP;
Yasuko Aoki, Mito, JP;
Hideo Morishita, Hachioji, JP;
Michio Hatano, Hitachinaka, JP;
Takashi Ohshima, Saitama, JP;
Mitsugu Sato, Hitachinaka, JP;
Tetsuya Sawahata, Hitachinaka, JP;
Sukehiro Ito, Hitachinaka, JP;
Yasuko Aoki, Mito, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (-); an aperture () that limits the diameter of the charged particle beam (); optics () for the charged particle beam; a specimen holder (); a charged particle detector () that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector () is provided with a first small detector () having a first detection sensitivity and a second small detector () having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam () is to be radiated, to be the same for the first small detector () and the second small detector ().