The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2013
Filed:
Sep. 02, 2011
Hitoshi Itoh, Nirasaki, JP;
Hidenori Miyoshi, Nirasaki, JP;
Masaru Hori, Nagoya, JP;
Hirotaka Toyoda, Nagoya, JP;
Makoto Sekine, Nagoya, JP;
Hitoshi Itoh, Nirasaki, JP;
Hidenori Miyoshi, Nirasaki, JP;
Masaru Hori, Nagoya, JP;
Hirotaka Toyoda, Nagoya, JP;
Makoto Sekine, Nagoya, JP;
Tokyo Electron Limited, Tokyo, JP;
National University Corporation Nagoya University, Nagoya-shi, Aichi-ken, JP;
Abstract
An apparatus for generating plasma, comprises: a microwave generator configured to generate a microwave; a wave guide which is connected to the microwave generator, wherein the wave guide is elongated in a traveling direction of the microwave and has a hollow shape having a rectangular section in a direction perpendicular to the traveling direction; a gas feeder which is connected to the wave guide and feeds process gas into the wave guide; and an antenna unit which is a part of the wave guide and discharges plasma generated by the microwave to the outside, wherein the antenna unit has one or more slots formed on a wall constituting a short side in a section of the antenna unit, plasmarizes the process gas fed into the wave guide under an atmospheric pressure in the slots by the microwave, and discharges the plasma out of the slots.