The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Mar. 07, 2012
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Frank Staals, Eindhoven, NL;
Lukasz Jerzy Macht, Eindhoven, NL;
William Peter Van Drent, Best, NL;
Erik Willem Bogaart, Eindhoven, NL;
Engelbertus Antonius Fransiscus Van Der Pasch, Oirschot, NL;
Emiel Jozef Melanie Eussen, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Frank Staals, Eindhoven, NL;
Lukasz Jerzy Macht, Eindhoven, NL;
William Peter Van Drent, Best, NL;
Erik Willem Bogaart, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus including a substrate table position measurement system and a projection system position measurement system to measure a position of the substrate table and the projection system, respectively. The substrate table position measurement system includes a substrate table reference element mounted on the substrate table and a first sensor head. The substrate table reference element extends in a measurement plane substantially parallel to the holding plane of a substrate on substrate table. The holding plane is arranged at one side of the measurement plane and the first sensor head is arranged at an opposite side of the measurement plane. The projection system position measurement system includes one or more projection system reference elements and a sensor assembly. The sensor head and the sensor assembly or the associated projection system measurement elements are mounted on a sensor frame.