The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2013
Filed:
May. 06, 2009
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Martinus Hendrikus Antonius Leenders, Rhoon, NL;
Frits Van Der Meulen, Eindhoven, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Anko Jozef Cornelus Sijben, Uden, NL;
Wouterus Johannes Petrus Maria Maas, Boxtel, NL;
Hendrikus Johannes Marinus Van Abeelen, Moergestel, NL;
Henricus Petrus Versteijnen, Hilvarenbeek, NL;
Paula Steffens, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Martinus Hendrikus Antonius Leenders, Rhoon, NL;
Frits Van der Meulen, Eindhoven, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Anko Jozef Cornelus Sijben, Uden, NL;
Wouterus Johannes Petrus Maria Maas, Boxtel, NL;
Hendrikus Johannes Marinus Van Abeelen, Moergestel, NL;
Henricus Petrus Versteijnen, Hilvarenbeek, NL;
Paula Steffens, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A substrate table is disclosed in which heaters are provided to account for a heat load which may be applied to the substrate. The heaters are grouped in segments to improve control. A temperature sensor per segment may be provided. The temperature sensor may be embedded in the substrate table.