The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
May. 18, 2010
Momoyo Enyama, Kunitachi, JP;
Hiroya Ohta, Kokubunji, JP;
Taku Ninomiya, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Momoyo Enyama, Kunitachi, JP;
Hiroya Ohta, Kokubunji, JP;
Taku Ninomiya, Hitachinaka, JP;
Mari Nozoe, Hino, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Disclosed is a charged particle beam device, wherein multibeam secondary electron detectors () and a single beam detector () are provided, and under the control of a system control unit (), an optical system control circuit () controls a lens and a beam selecting diaphragm () and switches the electrooptical conditions between those for multibeam mode and those for single beam mode, thereby one charged particle beam device can be operated as a multibeam charged particle device and a single beam charged particle device by switching. Thus, observation conditions are flexibly changed in accordance with an object to be observed, and a sample can be observed with a high accuracy and high efficiency.