The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Jun. 23, 2010
Patrick Huet, San Jose, CA (US);
Brian Duffy, San Jose, CA (US);
Martin Plihal, Pleasanton, CA (US);
Thomas Trautzsch, Jena, DE;
Chris Maher, Campbell, CA (US);
Patrick Huet, San Jose, CA (US);
Brian Duffy, San Jose, CA (US);
Martin Plihal, Pleasanton, CA (US);
Thomas Trautzsch, Jena, DE;
Chris Maher, Campbell, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Systems and methods for monitoring time-varying classification performance are disclosed. A method may include, but is not limited to: receiving one or more signals indicative of one or more properties of one or more samples from one or more scanning inspection tools; determining populations of one or more defect types for the one or more samples according an application of one or more classification rules to the one or more signals received from the one or more scanning inspection tools; determining populations of the one or more defect types for the one or more samples using one or more high-resolution inspection tools; and computing one or more correlations between populations of one or more defect types for one or more samples determined from application of one or more classification rules applied to one or more signals received from the one or more scanning inspection tools and populations of the one or more defect types for the one or more samples determined using the one or more high-resolution inspection tools.