The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
May. 18, 2012
Applicants:
Anthony Mowry, Buda, TX (US);
Casey Scott, Dresden, DE;
Vassilios Papageorgiou, Austin, TX (US);
Andy Wei, Dresden, DE;
Markus Lenski, Dresden, DE;
Andreas Gehring, Dresden, DE;
Inventors:
Anthony Mowry, Buda, TX (US);
Casey Scott, Dresden, DE;
Vassilios Papageorgiou, Austin, TX (US);
Andy Wei, Dresden, DE;
Markus Lenski, Dresden, DE;
Andreas Gehring, Dresden, DE;
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
By providing a test structure for evaluating the patterning process and/or the epitaxial growth process for forming embedded semiconductor alloys in sophisticated semiconductor devices, enhanced statistical relevance in combination with reduced test time may be accomplished.