The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Jul. 12, 2006
Applicants:
Robert P. Meagley, Beaverton, OR (US);
Kevin P. O'brien, Portland, OR (US);
Tian-an Chen, Phoenix, AZ (US);
Michael D. Goodner, Hillsboro, OR (US);
James Powers, Aloha, OR (US);
Huey-chiang Liou, Fremont, CA (US);
Inventors:
Robert P. Meagley, Beaverton, OR (US);
Kevin P. O'Brien, Portland, OR (US);
Tian-An Chen, Phoenix, AZ (US);
Michael D. Goodner, Hillsboro, OR (US);
James Powers, Aloha, OR (US);
Huey-Chiang Liou, Fremont, CA (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/58 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor structure may be covered with a thermally decomposing film. That film may then be covered by a sealing cover. Subsequently, the thermally decomposing material may be decomposed, forming a cavity.