The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Mar. 16, 2011
Hung-chun Wang, Taichung County, TW;
Pei-shiang Chen, Hsinchu, TW;
Tzu-chin Lin, Hsinchu, TW;
Faruk Krecinic, Hsin Chu, TW;
Jeng-horng Chen, Hsin-Chu, TW;
Wen-chun Huang, Tainan County, TW;
Ru-gun Liu, Hsinchu, TW;
Hung-Chun Wang, Taichung County, TW;
Pei-Shiang Chen, Hsinchu, TW;
Tzu-Chin Lin, Hsinchu, TW;
Faruk Krecinic, Hsin Chu, TW;
Jeng-Horng Chen, Hsin-Chu, TW;
Wen-Chun Huang, Tainan County, TW;
Ru-Gun Liu, Hsinchu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
The present disclosure provides for many different embodiments of a charged particle beam data storage system and method. In an example, a method includes dividing a design layout into a plurality of units; creating a lookup table that maps each of the plurality of units to its position within the design layout and a data set, wherein the lookup table associates any repeating units in the plurality of units to a same data set; and exposing an energy sensitive layer to a charged particle beam based on the lookup table.