The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Jul. 19, 2010
Thorsten Kammler, Ottendorf-Okrilla, DE;
Maciej Wiatr, Dresden, DE;
Roman Boschke, Dresden, DE;
Peter Javorka, Radeburg, DE;
Thorsten Kammler, Ottendorf-Okrilla, DE;
Maciej Wiatr, Dresden, DE;
Roman Boschke, Dresden, DE;
Peter Javorka, Radeburg, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
In a static memory cell, the failure rate upon forming contact elements connecting an active region with a gate electrode structure formed above an isolation region may be significantly reduced by incorporating an implantation species at a tip portion of the active region through a sidewall of the isolation trench prior to filling the same with an insulating material. The implantation species may represent a P-type dopant species and/or an inert species for significantly modifying the material characteristics at the tip portion of the active region.