The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Apr. 21, 2011
Stephen R. Hooper, Mesa, AZ (US);
Dwight L. Daniels, Phoenix, AZ (US);
James D. Macdonald, Chandler, AZ (US);
William G. Mcdonald, Payson, AZ (US);
Chunlin C. Xia, Phoenix, AZ (US);
Stephen R. Hooper, Mesa, AZ (US);
Dwight L. Daniels, Phoenix, AZ (US);
James D. MacDonald, Chandler, AZ (US);
William G. McDonald, Payson, AZ (US);
Chunlin C. Xia, Phoenix, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
Fabrication methods are provided for a sensor device packages. An exemplary fabrication method involves bonding a sensor structure and another structure using a sealing structure. The sealing structure surrounds a diaphragm region of the sensor structure and provides an airtight seal between the sensor structure and the other structure to establish a fixed reference pressure on one side of the diaphragm region.